Verification Artifacts for Microscopes

We have been carrying out extensive research activity in creating and testing microscope verification artifacts, as well as contributing to the development of industry standards.


Artifact for verification of Manta series microscopes
as per IEC 61300-3-35
The IEC 61300-3-35 (Edition 3.0) requires that on commissioning, and periodically during its life, the microscope system shall be validated. The validation procedure shall involve using validation artifacts with specific features. For verification of Manta series microscopes (Manta HM, Manta W+, Manta+V2) we offer the artifacts that outperform the minimum requirements set by the standard and feature two scratches of 1 μm width as well as controlled depth.

The report provided with a reference artifact contains the data from measurements made on Atomic Force Microscope (AFM) and Manta HM microscope with NIST traceable factory calibration.

Note: Sumix also has the capability to produce the scratches of custom width upon request (2 µm, 3 µm etc.).